Invention Grant
- Patent Title: Semiconductor device and method for manufacturing the same
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Application No.: US14578259Application Date: 2014-12-19
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Publication No.: US09252046B2Publication Date: 2016-02-02
- Inventor: Sang Ho Sohn
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon
- Assignee: SK HYNIX INC.
- Current Assignee: SK HYNIX INC.
- Current Assignee Address: KR Icheon
- Priority: KR10-2011-0002353 20110110
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L21/768 ; H01L27/108

Abstract:
A semiconductor device and a method for manufacturing the same are disclosed. The semiconductor device includes adjacent storage node contact plugs having different heights, and lower-electrode bowing profiles having different heights, such that a spatial margin between the lower electrodes is assured and a bridge fail is prevented, resulting in improved device operation characteristics. The semiconductor device includes a first storage node contact plug and a second storage node contact plug formed over a semiconductor substrate, wherein the second storage node contact plug is arranged at a height different from that of the first storage node contact plug, and a lower electrode formed over the first storage node contact plug and the second storage node contact plug.
Public/Granted literature
- US20150140804A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2015-05-21
Information query
IPC分类: