Invention Grant
- Patent Title: Plasma processing apparatus
- Patent Title (中): 等离子体处理装置
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Application No.: US13334400Application Date: 2011-12-22
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Publication No.: US09251998B2Publication Date: 2016-02-02
- Inventor: Hidetoshi Hanaoka
- Applicant: Hidetoshi Hanaoka
- Applicant Address: JP
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP
- Agency: Cantor Colburn LLP
- Priority: JP2010-290508 20101227
- Main IPC: H01L21/00
- IPC: H01L21/00 ; C23C16/00 ; H01J37/32

Abstract:
A plasma processing apparatus includes: a radio frequency (RF) power source which applies an RF power to a lower electrode; a direct current (DC) power source which applies a DC voltage to an upper electrode; a ground member for the DC voltage that is a ring shape formed of a conductive material, that is arranged in the processing chamber such that at least a part of the ground member is exposed to the processing space, and that forms a ground potential with respect to the DC voltage applied to the upper electrode; and a plurality of vertical movement mechanisms which move the ground member for the DC voltage in a vertical direction to adjust a grounding state of the ground member for the DC voltage.
Public/Granted literature
- US20120160418A1 PLASMA PROCESSING APPARATUS Public/Granted day:2012-06-28
Information query
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