Invention Grant
- Patent Title: Chemical bath deposition (CBD) apparatus
- Patent Title (中): 化学浴沉积（CBD）设备
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Application No.: US13452933Application Date: 2012-04-23
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Publication No.: US09249507B2Publication Date: 2016-02-02
- Inventor: Wei-Tse Hsu , Tung-Po Hsieh , Song-Yeu Tsai
- Applicant: Wei-Tse Hsu , Tung-Po Hsieh , Song-Yeu Tsai
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Agency: Jianq Chyun IP Office
- Priority: TW100146215A 20111214
- Main IPC: B05C3/02
- IPC: B05C3/02 ; B05C3/04 ; B05B1/00 ; C23C18/12
Abstract:
A chemical bath deposition (CBD) apparatus includes a first cap, a second cap, and a solution input/output device. The second cap is arranged corresponding to the first cap so as to form a deposition space. The solution input/output device is located in the first cap so as to feed a solution into/out of the deposition space. The position of the solution input/output device is fixed, or the solution input/output device is movable in the deposition space.
Public/Granted literature
- US20130152856A1 CHEMICAL BATH DEPOSITION (CBD) APPARATUS Public/Granted day:2013-06-20
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