Invention Grant
US09249503B2 Method for double-side vacuum film formation and laminate obtainable by the method
有权
双面真空成膜方法和通过该方法得到的层压体
- Patent Title: Method for double-side vacuum film formation and laminate obtainable by the method
- Patent Title (中): 双面真空成膜方法和通过该方法得到的层压体
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Application No.: US13559094Application Date: 2012-07-26
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Publication No.: US09249503B2Publication Date: 2016-02-02
- Inventor: Tomotake Nashiki , Yoshimasa Sakata , Hideo Sugawara , Kenkichi Yagura , Akira Hamada , Yoshihisa Ito , Kuniaki Ishibashi
- Applicant: Tomotake Nashiki , Yoshimasa Sakata , Hideo Sugawara , Kenkichi Yagura , Akira Hamada , Yoshihisa Ito , Kuniaki Ishibashi
- Applicant Address: JP Ibaraki-Shi, Osaka
- Assignee: NITTO DENKO CORPORATION
- Current Assignee: NITTO DENKO CORPORATION
- Current Assignee Address: JP Ibaraki-Shi, Osaka
- Agency: Haumptman Ham, LLP
- Priority: JP2011-166668 20110729; JP2012-156279 20120712
- Main IPC: C23C14/56
- IPC: C23C14/56

Abstract:
The film formation method comprises the steps of: unrolling and feeding an elongated substrate wound in a roll form from a first roll chamber in a first direction from the first roll chamber toward a second roll chamber, using a first surface as a surface for film formation; degassing the substrate fed in the first direction; forming a second material film on the first surface of the substrate in a second film formation chamber; taking up the substrate in a roll form in the second roll chamber, the substrate having the second material film formed thereon; unrolling and feeding the substrate from the second roll chamber in a second direction from the second roll chamber toward the first roll chamber; forming a first material film on the second material film in a first film formation chamber; taking up the substrate in a roll form in the first roll chamber.
Public/Granted literature
- US20130029162A1 METHOD FOR DOUBLE-SIDE VACUUM FILM FORMATION AND LAMINATE OBTAINABLE BY THE METHOD Public/Granted day:2013-01-31
Information query
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