Invention Grant
- Patent Title: Tuning a parameter associated with plasma impedance
- Patent Title (中): 调整与等离子体阻抗相关的参数
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Application No.: US13740047Application Date: 2013-01-11
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Publication No.: US09155182B2Publication Date: 2015-10-06
- Inventor: John C. Valcore, Jr. , Bradford J. Lyndaker
- Applicant: John C. Valcore, Jr. , Bradford J. Lyndaker
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla Group, LLP
- Main IPC: H05H1/46
- IPC: H05H1/46 ; H01J37/32

Abstract:
Systems and methods for tuning a parameter associated with plasma impedance are described. One of the methods includes receiving information to determine a variable. The information is measured at a transmission line and is measured when the parameter has a first value. The transmission line is used to provide power to a plasma chamber. The method further includes determining whether the variable is at a local minima and providing the first value to tune the impedance matching circuit upon determining that the variable is at the local minima. The method includes changing the first value to a second value of the parameter upon determining that the variable is not at the local minima and determining whether the variable is at a local minima when the parameter has the second value.
Public/Granted literature
- US20140197731A1 Tuning A Parameter Associated With Plasma Impedance Public/Granted day:2014-07-17
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