Invention Grant
US09154109B2 Vibrator, oscillator, electronic apparatus, moving object, and method of manufacturing vibrator
有权
振动器，振荡器，电子设备，运动物体和制造振动器的方法
- Patent Title: Vibrator, oscillator, electronic apparatus, moving object, and method of manufacturing vibrator
- Patent Title (中): 振动器，振荡器，电子设备，运动物体和制造振动器的方法
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Application No.: US14132475Application Date: 2013-12-18
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Publication No.: US09154109B2Publication Date: 2015-10-06
- Inventor: Shogo Inaba , Akinori Yamada , Aritsugu Yajima
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2012-284481 20121227; JP2013-061554 20130325
- Main IPC: H03H9/00
- IPC: H03H9/00 ; H03H9/24 ; H03H3/007
Abstract:
An MEMS vibrator includes a substrate, a fixation section disposed above a principal surface of the substrate, a support section extending from the fixation section, and a vibrating body (an upper electrode) separated from the substrate and supported by the support section in a node part of a vibration, and the vibrating body is a 2n-fold rotationally symmetric body having 2n beams radially extending from a node part of a vibration, wherein n is a natural number.
Public/Granted literature
- US20140184018A1 VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, MOVING OBJECT, AND METHOD OF MANUFACTURING VIBRATOR Public/Granted day:2014-07-03
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