Invention Grant
US09078069B2 MEMS microphone with springs and interior support 有权
具有弹簧和内部支撑的MEMS麦克风

MEMS microphone with springs and interior support
Abstract:
A MEMS microphone has a stationary portion with a backplate having a plurality of apertures, and a diaphragm spaced from the backplate and having an outer periphery. As a condenser microphone, the diaphragm and backplate form a variable capacitor. The microphone also has a post extending between, and substantially permanently connected with, both the backplate and the diaphragm, and a set of springs securing the diaphragm to at least one of the post and the stationary portion. The post is positioned to be radially inward of the outer periphery of the diaphragm.
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