Invention Grant
- Patent Title: MEMS microphone with springs and interior support
- Patent Title (中): 具有弹簧和内部支撑的MEMS麦克风
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Application No.: US13348400Application Date: 2012-01-11
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Publication No.: US09078069B2Publication Date: 2015-07-07
- Inventor: Sushil Bharatan , Aleksey S. Khenkin , Thomas D. Chen
- Applicant: Sushil Bharatan , Aleksey S. Khenkin , Thomas D. Chen
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: IPxLaw Group LLP
- Agent Maryam Imam
- Main IPC: H04R1/00
- IPC: H04R1/00 ; H04R19/04 ; H04R7/04 ; H04R7/20 ; H04R19/00

Abstract:
A MEMS microphone has a stationary portion with a backplate having a plurality of apertures, and a diaphragm spaced from the backplate and having an outer periphery. As a condenser microphone, the diaphragm and backplate form a variable capacitor. The microphone also has a post extending between, and substantially permanently connected with, both the backplate and the diaphragm, and a set of springs securing the diaphragm to at least one of the post and the stationary portion. The post is positioned to be radially inward of the outer periphery of the diaphragm.
Public/Granted literature
- US20130177180A1 MEMS Microphone with Springs and Interior Support Public/Granted day:2013-07-11
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