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US09076982B2 Patterning slit sheet assembly, organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus, and the organic light-emitting display apparatus 有权
图案化狭缝片组件，有机层沉积装置，有机发光显示装置的制造方法和有机发光显示装置

Patterning slit sheet assembly, organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus, and the organic light-emitting display apparatus
Abstract:
A patterning slit sheet assembly for performing a deposition process to form a thin film on a substrate in a desired fine pattern. The patterning slit sheet assembly includes a patterning slit sheet having a plurality of slits, a frame combined with the patterning slit sheet to support the patterning slit sheet, and a support unit including an upper member that is allowed to be moved or fixed to support the patterning slit sheet when a gravitational force is applied to the patterning slit sheet and a lower member disposed more apart from the patterning slit sheet than the upper member, wherein the upper member is fixed on the lower member.
Abstract(Chinese):

一种图案化缝隙片组件，用于执行沉积工艺以在所需的精细图案中在衬底上形成薄膜。 图形化缝隙片组件包括具有多个狭缝的图案化缝隙片，与图案化缝隙片组合以支撑图案化缝隙片的框架，以及支撑单元，其包括允许移动或固定以支撑图案化缝隙片的上部构件 当向图案化缝隙片施加重力时构图缝隙片和与图案化缝隙片比上部构件更远离的下部构件，其中上部构件固定在下部构件上。

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