Invention Grant
US09076968B2 Piezoelectric element, piezoelectric actuator, piezoelectric sensor, hard disk drive, and inkjet printer device
有权
压电元件，压电致动器，压电传感器，硬盘驱动器和喷墨打印机装置
- Patent Title: Piezoelectric element, piezoelectric actuator, piezoelectric sensor, hard disk drive, and inkjet printer device
- Patent Title (中): 压电元件，压电致动器，压电传感器，硬盘驱动器和喷墨打印机装置
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Application No.: US13827364Application Date: 2013-03-14
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Publication No.: US09076968B2Publication Date: 2015-07-07
- Inventor: Yasuhiro Aida , Yoshitomo Tanaka , Hitoshi Sakuma , Katsuyuki Kurachi , Kazuhiko Maejima
- Applicant: TDK CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TDK CORPORATION
- Current Assignee: TDK CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Main IPC: H01L41/187
- IPC: H01L41/187 ; B41J2/045 ; G01L1/16 ; H01L41/08 ; G01L9/00 ; H01L41/09
Abstract:
A piezoelectric element includes, as a piezoelectric layer, a thin film of potassium sodium niobate that is a perovskite compound represented by a general expression ABO3, in which Ta (tantalum) is substituted on both of an A site and a B site. Accordingly, the piezoelectric element is provided to increase a reliability of the piezoelectric element using the thin film of potassium sodium niobate and to improve piezoelectric characteristics thereof.
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