Invention Grant
US09076830B2 Robot systems and apparatus adapted to transport dual substrates in electronic device manufacturing with wrist drive motors mounted to upper arm
有权
机器人系统和设备适用于在安装到上臂的手腕驱动电机的电子设备制造中传输双基板
- Patent Title: Robot systems and apparatus adapted to transport dual substrates in electronic device manufacturing with wrist drive motors mounted to upper arm
- Patent Title (中): 机器人系统和设备适用于在安装到上臂的手腕驱动电机的电子设备制造中传输双基板
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Application No.: US13662946Application Date: 2012-10-29
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Publication No.: US09076830B2Publication Date: 2015-07-07
- Inventor: Izya Kremerman , Jeffrey C. Hudgens , Damon Keith Cox
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Dugan & Dugan, PC
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B25J9/04
Abstract:
Substrate transport systems and robot apparatus are provided. The systems are adapted to pick or place a substrate at a destination by independently rotating an upper arm, a forearm, and dual wrist members relative to each other and a base. Methods of operating the robot apparatus are provided, as are numerous other aspects.
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