Invention Grant
- Patent Title: Determining spacing using a spatially varying charge distribution
- Patent Title (中): 使用空间变化的电荷分布确定间距
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Application No.: US13253893Application Date: 2011-10-05
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Publication No.: US09076663B2Publication Date: 2015-07-07
- Inventor: Ivan E. Sutherland
- Applicant: Ivan E. Sutherland
- Applicant Address: US CA Redwood Shores
- Assignee: ORACLE INTERNATIONAL CORPORATION
- Current Assignee: ORACLE INTERNATIONAL CORPORATION
- Current Assignee Address: US CA Redwood Shores
- Agency: Park, Vaughan, Fleming & Dowler LLP
- Agent Steven E. Stupp
- Main IPC: G01N27/00
- IPC: G01N27/00 ; H01L23/58 ; H01L25/065 ; H01L23/48 ; G01B7/14 ; G01B7/30 ; G01B7/02 ; H01L23/00

Abstract:
A semiconductor die is described. This semiconductor die includes a driver, and a spatial alignment transducer that is electrically coupled to the driver and which is proximate to a surface of the semiconductor die. The driver establishes a spatially varying electric charge distribution in at least one direction in the spatial alignment transducer, thereby facilitating determination of a vertical spacing between a surface of the semiconductor die and a surface of another semiconductor die. In particular, a spatial alignment sensor proximate to the surface of the other semiconductor die may detect an electrical field (or an associated electrostatic potential) associated with the spatially varying electric charge distribution. This detected electric field may allow the vertical spacing between the surfaces of the semiconductor dies to be determined.
Public/Granted literature
- US20130088212A1 DETERMINING SPACING USING A SPATIALLY VARYING CHARGE DISTRIBUTION Public/Granted day:2013-04-11
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