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US09075077B2 Resonant sensing using extensional modes of a plate 有权
使用板的延伸模式的谐振感测

Resonant sensing using extensional modes of a plate
Abstract:
A device or system that incorporates teachings of the present disclosure may include, for example, a resonant structure having a plate, a mass and a set of electrodes. The plate can have an extensional mode at a frequency when excited. The set of electrodes can be used to measure an acceleration of the mass when the acceleration of the mass changes the frequency of the plate. Other embodiments are disclosed.
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