Invention Grant
- Patent Title: Cordierite sintered body and member for semiconductor device composed of cordierite sintered body
- Patent Title (中): 堇青石烧结体和由堇青石烧结体组成的半导体器件
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Application No.: US14001129Application Date: 2012-02-22
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Publication No.: US09073790B2Publication Date: 2015-07-07
- Inventor: Tatsuji Furuse , Hiroaki Seno , Shuichi Iida , Kouki Okayama , Toshiaki Shigeoka
- Applicant: Tatsuji Furuse , Hiroaki Seno , Shuichi Iida , Kouki Okayama , Toshiaki Shigeoka
- Applicant Address: JP Kyoto
- Assignee: Kyocera Corporation
- Current Assignee: Kyocera Corporation
- Current Assignee Address: JP Kyoto
- Priority: JP2011-038567 20110224; JP2011-146034 20110630
- International Application: PCT/JP2012/054243 WO 20120222
- International Announcement: WO2012/115136 WO 20120830
- Main IPC: C04B35/195
- IPC: C04B35/195 ; C04B35/185 ; C04B35/626 ; C04B35/645

Abstract:
A cordierite sintered body and a member for semiconductor manufacturing apparatus are disclosed. The cordierite sintered body includes a crystal phase and an amorphous phase. The crystal phase includes a main crystal phase that essentially consists of cordierite crystal grains; and a sub crystal phase that includes sub crystal grains containing alumina, mullite or sapphirine. The amorphous phase contains calcium and is located at grain boundaries of the cordierite crystal grains and the sub crystal grains. A crystal phase proportion of the main crystal phase to the crystal phase (or total of the main crystal phase and the sub crystal phase) is 95% to 97.5% by mass or less. A crystal phase proportion of the sub crystal phase to the crystal phase is 2.5% to 5% by mass or less. The sintered body contains calcium by 0.4% to 0.6% by mass or less in terms of CaO.
Public/Granted literature
- US20140171288A1 CORDIERITE SINTERED BODY AND MEMBER FOR SEMICONDUCTOR DEVICE COMPOSED OF CORDIERITE SINTERED BODY Public/Granted day:2014-06-19
Information query
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