Invention Grant
US09055372B2 Acoustic transducer with gap-controlling geometry and method of manufacturing an acoustic transducer
有权
具有间隙控制几何形状的声学传感器和制造声换能器的方法
- Patent Title: Acoustic transducer with gap-controlling geometry and method of manufacturing an acoustic transducer
- Patent Title (中): 具有间隙控制几何形状的声学传感器和制造声换能器的方法
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Application No.: US13398631Application Date: 2012-02-16
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Publication No.: US09055372B2Publication Date: 2015-06-09
- Inventor: Karl Grosh , Robert John Littrell
- Applicant: Karl Grosh , Robert John Littrell
- Applicant Address: US MA Boston
- Assignee: Vesper Technologies Inc.
- Current Assignee: Vesper Technologies Inc.
- Current Assignee Address: US MA Boston
- Agency: Fish & Richardson P.C.
- Main IPC: H01L41/09
- IPC: H01L41/09 ; H01L41/22 ; H04R17/02 ; H04R31/00 ; H04R7/06

Abstract:
A transducer of the preferred embodiment including a transducer and a plurality of adjacent, tapered cantilevered beams. Each of the beams define a beam base, a beam tip, and a beam body disposed between the beam base and the beam tip. The beams are arranged such that each of the beam tips extends toward a common area. Each beam is joined to the substrate along the beam base and is free from the substrate along the beam body. A preferred method of manufacturing a transducer can include: depositing alternating layers of piezoelectric and electrode onto the substrate in block, processing the deposited layers to define cantilever geometry in block, depositing metal traces in block, and releasing the cantilevered beams from the substrate in block.
Public/Granted literature
- US20120250909A1 ACOUSTIC TRANSDUCER WITH GAP-CONTROLLING GEOMETRY AND METHOD OF MANUFACTURING AN ACOUSTIC TRANSDUCER Public/Granted day:2012-10-04
Information query
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