Invention Grant
- Patent Title: Compact charge trap multi-time programmable memory
- Patent Title (中): 紧凑型电荷阱多次可编程存储器
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Application No.: US13587072Application Date: 2012-08-16
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Publication No.: US09054209B2Publication Date: 2015-06-09
- Inventor: Eng Huat Toh , Khee Yong Lim , Shyue Seng Tan , Elgin Quek
- Applicant: Eng Huat Toh , Khee Yong Lim , Shyue Seng Tan , Elgin Quek
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Ditthavong & Steiner, P.C.
- Main IPC: H01L29/792
- IPC: H01L29/792 ; H01L21/28 ; H01L29/423 ; H01L29/66

Abstract:
A method for enabling fabrication of memory devices requiring no or minimal additional mask for fabrication having a low cost, a small footprint, and multiple-time programming capability is disclosed. Embodiments include: forming a gate stack on a substrate; forming a source extension region in the substrate on one side of the gate stack, wherein no drain extension region is formed on the other side of the gate stack; forming a tunnel oxide liner on side surfaces of the gate stack and on the substrate on each side of the gate stack; forming a charge-trapping spacer on each tunnel oxide liner; and forming a source in the substrate on the one side of the gate stack and a drain in the substrate on the other side of the gate stack.
Public/Granted literature
- US20140048865A1 NOVEL COMPACT CHARGE TRAP MULTI-TIME PROGRAMMABLE MEMORY Public/Granted day:2014-02-20
Information query
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