Invention Grant
- Patent Title: Oxide semiconductor thin film transistor and manufacturing method thereof
- Patent Title (中): 氧化物半导体薄膜晶体管及其制造方法
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Application No.: US13965176Application Date: 2013-08-12
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Publication No.: US09054202B2Publication Date: 2015-06-09
- Inventor: Hsi-Ming Chang
- Applicant: Chunghwa Picture Tubes, LTD.
- Applicant Address: TW Taoyuan
- Assignee: Chunghwa Picture Tubes, LTD.
- Current Assignee: Chunghwa Picture Tubes, LTD.
- Current Assignee Address: TW Taoyuan
- Agency: Jianq Chyun IP Office
- Priority: TW102121756A 20130619
- Main IPC: H01L29/12
- IPC: H01L29/12 ; H01L29/786 ; H01L29/66

Abstract:
An oxide semiconductor thin film transistor includes a source, a drain, a channel layer, an insulation layer, a first conductor and a second conductor. The channel layer is disposed between the source and the drain, and separated from the source and the drain. The insulation layer covers the source, the drain and the channel layer. The first conductor is at least disposed in a first opening of the insulation layer so as to touch the source and the channel layer. The second conductor is at least disposed in a second opening of the insulation layer so as to touch the drain and the channel layer.
Public/Granted literature
- US20140374739A1 OXIDE SEMICONDUCTOR THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF Public/Granted day:2014-12-25
Information query
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