Invention Grant
- Patent Title: Semiconductor device
- Patent Title (中): 半导体器件
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Application No.: US13471389Application Date: 2012-05-14
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Publication No.: US09054122B2Publication Date: 2015-06-09
- Inventor: Satoshi Maeda , Yasushi Sekine , Tetsuya Watanabe
- Applicant: Satoshi Maeda , Yasushi Sekine , Tetsuya Watanabe
- Applicant Address: JP Kawasaki-shi, Kanagawa
- Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee Address: JP Kawasaki-shi, Kanagawa
- Agency: Miles & Stockbridge P.C.
- Priority: JP2008-068807 20080318
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L49/02 ; H01L23/522 ; H01L27/06 ; H01L27/02

Abstract:
To improve a performance of a semiconductor device having a capacitance element. An MIM type capacitance element, an electrode of which is formed with comb-shaped metal patterns composed of the wirings, is formed over a semiconductor substrate. A conductor pattern, which is a dummy gate pattern for preventing dishing in a CMP process, and an active region, which is a dummy active region, are disposed below the capacitance element, and these are coupled to shielding metal patterns composed of the wirings and then connected to a fixed potential. Then, the conductor pattern and the active region are disposed so as not to overlap the comb-shaped metal patterns in the wirings in a planar manner.
Public/Granted literature
- US20120223375A1 SEMICONDUCTOR DEVICE Public/Granted day:2012-09-06
Information query
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