Invention Grant
US09054007B2 Image sensor pixel cell with switched deep trench isolation structure
有权
具有开关深沟槽隔离结构的图像传感器像素单元
- Patent Title: Image sensor pixel cell with switched deep trench isolation structure
- Patent Title (中): 具有开关深沟槽隔离结构的图像传感器像素单元
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Application No.: US13968210Application Date: 2013-08-15
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Publication No.: US09054007B2Publication Date: 2015-06-09
- Inventor: Sing-Chung Hu , Rongsheng Yang , Gang Chen , Howard E. Rhodes , Sohei Manabe , Hsin-Chih Tai
- Applicant: OMNIVISION TECHNOLOGIES, INC.
- Applicant Address: US CA Santa Clara
- Assignee: OmniVision Technologies, Inc.
- Current Assignee: OmniVision Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely Sokoloff Taylor & Zafman LLP
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L27/092

Abstract:
A pixel cell includes a photodiode disposed in an epitaxial layer in a first region of semiconductor material. A floating diffusion is disposed in a well region disposed in the epitaxial layer in the first region. A transfer transistor is disposed in the first region and coupled between the photodiode and the floating diffusion to selectively transfer image charge from the photodiode to the floating diffusion. A deep trench isolation (DTI) structure lined with a dielectric layer inside the DTI structure is disposed in the semiconductor material isolates the first region on one side of the DTI structure from a second region of the semiconductor material on an other side of the DTI structure. Doped semiconductor material inside the DTI structure is selectively coupled to a readout pulse voltage in response to the transfer transistor selectively transferring the image charge from the photodiode to the floating diffusion.
Public/Granted literature
- US20150048427A1 IMAGE SENSOR PIXEL CELL WITH SWITCHED DEEP TRENCH ISOLATION STRUCTURE Public/Granted day:2015-02-19
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