Invention Grant
- Patent Title: Thin-film transistor, display unit, and electronic apparatus
- Patent Title (中): 薄膜晶体管,显示单元和电子设备
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Application No.: US14273847Application Date: 2014-05-09
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Publication No.: US09053984B2Publication Date: 2015-06-09
- Inventor: Yuichi Kato
- Applicant: Sony Corporation
- Applicant Address: JP Tokyo
- Assignee: SONY CORPORATION
- Current Assignee: SONY CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: K&L Gates LLP
- Priority: JP2013-109773 20130524
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/10 ; H01L29/786

Abstract:
Provided is a thin-film transistor that includes: a substrate; a first barrier film formed on the substrate; a second barrier film formed in a selective region on the first barrier film, and having a barrier property against hydrogen; an oxide semiconductor layer including a first part formed on the second barrier film and a second part formed on the first barrier film, in which the first part functions as an active layer, and the second part has lower electrical resistance than the first part; a gate electrode formed on the first part of the oxide semiconductor layer with a gate insulating film therebetween; and a source electrode or drain electrode electrically connected to the second part of the oxide semiconductor layer. The first barrier film has a barrier property against an impurity from the substrate and a property of chemically reducing the oxide semiconductor layer.
Public/Granted literature
- US20140346499A1 THIN-FILM TRANSISTOR, DISPLAY UNIT, AND ELECTRONIC APPARATUS Public/Granted day:2014-11-27
Information query
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