Invention Grant
- Patent Title: Patterned strained semiconductor substrate and device
- Patent Title (中): 图形应变半导体衬底和器件
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Application No.: US12686040Application Date: 2010-01-12
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Publication No.: US09053970B2Publication Date: 2015-06-09
- Inventor: Kangguo Cheng , Ramachandra Divakaruni
- Applicant: Kangguo Cheng , Ramachandra Divakaruni
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Joseph P. Abate
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/739 ; H01L29/786 ; H01L21/8234

Abstract:
A device that includes a pattern of strained material and relaxed material on a substrate, a strained device in the strained material, and a non-strained device in the relaxed material. The strained material may be silicon (Si) in either a tensile or compressive state, and the relaxed material is Si in a normal state. A buffer layer of silicon germanium (SiGe), silicon carbon (SiC), or similar material is formed on the substrate and has a lattice constant/structure mis-match with the substrate. A relaxed layer of SiGe, SiC, or similar material is formed on the buffer layer and places the strained material in the tensile or compressive state. Carbon-doped silicon or germanium-doped silicon may be used to form the strained material. The structure includes a multi-layered substrate having strained and non-strained materials patterned thereon.
Public/Granted literature
- US20100109049A1 PATTERNED STRAINED SEMICONDUCTOR SUBSTRATE AND DEVICE Public/Granted day:2010-05-06
Information query
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