Invention Grant
- Patent Title: Semiconductor device and method of manufacturing the same
- Patent Title (中): 半导体装置及其制造方法
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Application No.: US13087363Application Date: 2011-04-14
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Publication No.: US09053937B2Publication Date: 2015-06-09
- Inventor: Sang Hee Park , Chi Sun Hwang , Chun Won Byun , Elvira M. C. Fortunato , Rodrigo F. P. Martins , Ana R. X. Barros , Nuno F. O. Correia , Pedro M. C. Barquinha , Vitor M. L. Figueiredo
- Applicant: Sang Hee Park , Chi Sun Hwang , Chun Won Byun , Elvira M. C. Fortunato , Rodrigo F. P. Martins , Ana R. X. Barros , Nuno F. O. Correia , Pedro M. C. Barquinha , Vitor M. L. Figueiredo
- Applicant Address: KR Daejeon PT Caparica
- Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE,FACULTY OF SCIENCE AND TECHNOLOGY NEW UNIVERSITY OF LISBON
- Current Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE,FACULTY OF SCIENCE AND TECHNOLOGY NEW UNIVERSITY OF LISBON
- Current Assignee Address: KR Daejeon PT Caparica
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2010-0034881 20100415; KR10-2010-0104744 20101026
- Main IPC: H01L29/22
- IPC: H01L29/22 ; H01L21/02 ; C23C14/08 ; H01L27/12 ; H01L29/49 ; H01L29/786 ; H01L29/94 ; H01L29/66 ; H01L21/8238 ; H01L27/092

Abstract:
Provided is a semiconductor device using a p-type oxide semiconductor layer and a method of manufacturing the same. The device includes the p-type oxide layer formed of at least one oxide selected from the group consisting of a copper(Cu)-containing copper monoxide, a tin(Sn)-containing tin monoxide, a copper tin oxide containing a Cu—Sn alloy, and a nickel tin oxide containing a Ni—Sn alloy. Thus, transparent or opaque devices are easily developed using the p-type oxide layer. Since an oxide layer that is formed using a low-temperature process is applied to a semiconductor device, the manufacturing process of the semiconductor device is simplified and manufacturing costs may be reduced.
Public/Granted literature
- US20110253997A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2011-10-20
Information query
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