Invention Grant
US09053904B2 Image quality adjusting method, non-transitory computer-readable recording medium, and electron microscope
有权
图像质量调整方法,非暂时性计算机可读记录介质和电子显微镜
- Patent Title: Image quality adjusting method, non-transitory computer-readable recording medium, and electron microscope
- Patent Title (中): 图像质量调整方法,非暂时性计算机可读记录介质和电子显微镜
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Application No.: US13764522Application Date: 2013-02-11
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Publication No.: US09053904B2Publication Date: 2015-06-09
- Inventor: Takashi Ishii , Akira Hamaguchi
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo
- Agency: Holtz, Holtz, Goodman & Chick PC
- Priority: JP2012-194956 20120905
- Main IPC: H01J37/26
- IPC: H01J37/26 ; H01J37/153 ; H01J37/28

Abstract:
In accordance with an embodiment, a method of adjusting quality of an image of patterns common in shape includes acquiring a first gray value and a first waveform within a reference image, acquiring a sample image, acquiring a second gray value and a second waveform from third and fourth regions within a sample image, respectively, and adjusting the brightness and contrast of the sample image. The first gray value is a standard for the brightness of the image from a first region within a reference image. The first and second waveforms represent a luminance profile of second and fourth regions including edges, respectively. The third and fourth regions correspond to the first and second regions. The brightness and contrast of the sample image are adjusted by matching the first gray value and the first waveform with the second gray value and the second waveform.
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