Invention Grant
US09053548B2 Lithography apparatus including display unit for updating data and article manufacturing method using same
有权
光刻设备包括用于更新数据的显示单元和使用其的制品制造方法
- Patent Title: Lithography apparatus including display unit for updating data and article manufacturing method using same
- Patent Title (中): 光刻设备包括用于更新数据的显示单元和使用其的制品制造方法
-
Application No.: US13958788Application Date: 2013-08-05
-
Publication No.: US09053548B2Publication Date: 2015-06-09
- Inventor: Chiaki Sato
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2012-188624 20120829
- Main IPC: A61N5/00
- IPC: A61N5/00 ; G06T5/00 ; G06T11/60 ; H01J37/317 ; B82Y10/00 ; B82Y40/00
Abstract:
A lithography apparatus converts vector pattern data into bitmap data and performs writing on a substrate with a charged particle beam based on the bitmap data. Here, the lithography apparatus includes a display unit and a processing unit that causes the display unit to display an image corresponding to the bitmap data and performs processing for updating the bitmap data by changing at least one of a pixel value, dimension, and shape of the image displayed on the display unit via a graphical user interface.
Public/Granted literature
- US20140065548A1 LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME Public/Granted day:2014-03-06
Information query
