Invention Grant
- Patent Title: Wafer prober integrated with full-wafer contactor
- Patent Title (中): 晶圆探针与全晶圆接触器集成
-
Application No.: US13068158Application Date: 2011-03-10
-
Publication No.: US09052355B2Publication Date: 2015-06-09
- Inventor: Morgan T. Johnson
- Applicant: Morgan T. Johnson
- Applicant Address: US CA Fremont
- Assignee: TRANSLARITY, INC.
- Current Assignee: TRANSLARITY, INC.
- Current Assignee Address: US CA Fremont
- Agency: Perkins Coie LLP
- Main IPC: G01R31/00
- IPC: G01R31/00 ; G01R31/28 ; G01R1/073

Abstract:
Methods and apparatus for testing unsingulated integrated circuits on a wafer include adapting a wafer prober for use with full-wafer-contacter disposed on the wafer. Some embodiments include placing wafer on a chuck of the prober, aligning the wafer to a full-wafer contacter incorporated in the wafer prober, removably attaching the wafer to the full wafer contacter, separating the wafer from the chuck, and making electrical contact to one or more integrated circuits of the wafer by making physical contact with a surface of the full-wafer contacter that faces away from the wafer.
Public/Granted literature
- US20130021052A1 Wafer prober integrated with full-wafer contacter Public/Granted day:2013-01-24
Information query