Invention Grant
- Patent Title: Measurement apparatus for measuring shape of test object and measurement method
- Patent Title (中): 测量对象形状的测量装置和测量方法
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Application No.: US13761349Application Date: 2013-02-07
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Publication No.: US09052189B2Publication Date: 2015-06-09
- Inventor: Yuya Nishikawa
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2012-045786 20120301
- Main IPC: G01B11/30
- IPC: G01B11/30 ; G01B11/24 ; G01B9/02

Abstract:
A measurement apparatus includes: a vibration detection surface which has a set relative position with respect to a test surface, and is irradiated with a part of the measurement light; an image sensor configured to sense, together with a first interference fringe generated by interference between reference light from a reference surface and measurement light from the test surface, a second interference fringe generated by interference between light from the vibration detection surface and the reference light; and a processor configured to obtain a relative vibration between the reference surface and the test surface by using data of the sensed second interference fringe, and obtain the shape of the test surface by using the obtained relative vibration and data of the sensed first interference fringe.
Public/Granted literature
- US20130229664A1 MEASUREMENT APPARATUS FOR MEASURING SHAPE OF TEST OBJECT AND MEASUREMENT METHOD Public/Granted day:2013-09-05
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