Invention Grant
US09052189B2 Measurement apparatus for measuring shape of test object and measurement method 有权
测量对象形状的测量装置和测量方法

Measurement apparatus for measuring shape of test object and measurement method
Abstract:
A measurement apparatus includes: a vibration detection surface which has a set relative position with respect to a test surface, and is irradiated with a part of the measurement light; an image sensor configured to sense, together with a first interference fringe generated by interference between reference light from a reference surface and measurement light from the test surface, a second interference fringe generated by interference between light from the vibration detection surface and the reference light; and a processor configured to obtain a relative vibration between the reference surface and the test surface by using data of the sensed second interference fringe, and obtain the shape of the test surface by using the obtained relative vibration and data of the sensed first interference fringe.
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