Invention Grant
- Patent Title: Sputtering target having amorphous and microcrystalline portions and method of producing same
- Patent Title (中): 具有非晶和微晶部分的溅射靶及其制造方法
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Application No.: US13267407Application Date: 2011-10-06
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Publication No.: US09051646B2Publication Date: 2015-06-09
- Inventor: Andreas Herzog , Sabine Schneider-Betz , Martin Schlott , Christoph Stahr
- Applicant: Andreas Herzog , Sabine Schneider-Betz , Martin Schlott , Christoph Stahr
- Applicant Address: DE Hanau
- Assignee: Heraeus Deutschland GmbH & Co. KG
- Current Assignee: Heraeus Deutschland GmbH & Co. KG
- Current Assignee Address: DE Hanau
- Agency: Panitch Schwarze Belisario & Nadel LLP
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C04B35/01

Abstract:
A sputtering target is provided which ensures the production of unvaryingly homogenous layers of the sputtering material during the lifespan of the sputtering target. The sputtering target includes a mixture of oxides of indium, zinc, and gallium, the mixture containing at least one ternary mixed oxide of indium, zinc, and gallium and at least one amorphous phase. The portion of ternary mixed oxides of indium, zinc, and gallium is at least 50 weight percent, relative to the total weight of the mixture, and the portion of amorphous phase is at least 20 weight percent, relative to the total weight of the mixture.
Public/Granted literature
- US20120085641A1 Sputtering Target Having Amorphous and Microcrystalline Portions and Method of Producing Same Public/Granted day:2012-04-12
Information query
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