Invention Grant
US09051646B2 Sputtering target having amorphous and microcrystalline portions and method of producing same 有权
具有非晶和微晶部分的溅射靶及其制造方法

Sputtering target having amorphous and microcrystalline portions and method of producing same
Abstract:
A sputtering target is provided which ensures the production of unvaryingly homogenous layers of the sputtering material during the lifespan of the sputtering target. The sputtering target includes a mixture of oxides of indium, zinc, and gallium, the mixture containing at least one ternary mixed oxide of indium, zinc, and gallium and at least one amorphous phase. The portion of ternary mixed oxides of indium, zinc, and gallium is at least 50 weight percent, relative to the total weight of the mixture, and the portion of amorphous phase is at least 20 weight percent, relative to the total weight of the mixture.
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