Invention Grant
- Patent Title: Surface acoustic wave device, electronic apparatus, and sensor apparatus
- Patent Title (中): 声表面波装置,电子仪器和传感器装置
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Application No.: US13223405Application Date: 2011-09-01
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Publication No.: US09048806B2Publication Date: 2015-06-02
- Inventor: Naohisa Obata
- Applicant: Naohisa Obata
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2010-201751 20100909
- Main IPC: H03H9/19
- IPC: H03H9/19 ; H01L41/18 ; H03H9/05 ; H03H9/02 ; H03H9/145

Abstract:
A SAW device includes an IDT which is provided on the principal surface of a quartz crystal substrate having Euler angles (−1.5°≦φ≦1.5°, 117°≦θ≦142°, |ψ|≠90°×n (where n=0, 1, 2, 3)) and excites a Rayleigh wave (wavelength: λ) in a stopband upper end mode. Inter-electrode-finger grooves are recessed between electrode fingers of the IDT. An IDT line occupancy η and an inter-electrode-finger groove depth G satisfy a predetermined relationship in terms of the wavelength λ, such that the SAW device has a frequency-temperature characteristic of a cubic curve having an inflection point between a maximum value and a minimum value in an operation temperature range. The inflection point is adjustable to a desired temperature or a desired temperature range depending on the IDT line occupancy η within an operation temperature range.
Public/Granted literature
- US20120068573A1 SURFACE ACOUSTIC WAVE DEVICE, ELECTRONIC APPARATUS, AND SENSOR APPARATUS Public/Granted day:2012-03-22
Information query
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