Invention Grant
- Patent Title: Semiconductor device and method for manufacturing semiconductor device
- Patent Title (中): 半导体装置及半导体装置的制造方法
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Application No.: US14003067Application Date: 2012-03-09
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Publication No.: US09048252B2Publication Date: 2015-06-02
- Inventor: Toshiro Sakamoto
- Applicant: Toshiro Sakamoto
- Applicant Address: JP Tokyo
- Assignee: Asahi Kasei Microdevices Corporation
- Current Assignee: Asahi Kasei Microdevices Corporation
- Current Assignee Address: JP Tokyo
- Agency: Morgan, Lewis & Bockius LLP
- Priority: JP2011-052052 20110309
- International Application: PCT/JP2012/001644 WO 20120309
- International Announcement: WO2012/120899 WO 20120913
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/8234 ; H01L29/08 ; H01L29/10 ; H01L29/78 ; H01L21/265

Abstract:
There are provided a semiconductor device having a drain region making a BLDD structure withstandable against a high voltage, sufficiently suppressing a hot-carrier deterioration, and having a high ESD withstandable characteristic, and a method for manufacturing the same. A semiconductor device is formed including a MOS transistor having a source region and a drain region both formed in a semiconductor substrate, and a channel region formed therebetween. At this time, the concentration of holes emitted form P-type impurities injected into the channel region and contributing an electrical conduction is lower at a side close to the drain region than at a side close to the source region. The drain region includes a drift region into which N-type impurities are injected. The drift region extends toward the channel region from the drain region except a nearby area to the surface of the semiconductor substrate.
Public/Granted literature
- US20130341716A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE Public/Granted day:2013-12-26
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