Invention Grant
US09046795B2 Optical element unit for exposure processes having sealing element
有权
用于具有密封元件的曝光工艺的光学元件单元
- Patent Title: Optical element unit for exposure processes having sealing element
- Patent Title (中): 用于具有密封元件的曝光工艺的光学元件单元
-
Application No.: US12046186Application Date: 2008-03-11
-
Publication No.: US09046795B2Publication Date: 2015-06-02
- Inventor: Tilman Schwertner , Ulrich Bingel , Guido Limbach , Julian Kaller , Hans-Juergen Scherle , Jens Kugler , Dirk Schaffer , Bernhard Gellrich
- Applicant: Tilman Schwertner , Ulrich Bingel , Guido Limbach , Julian Kaller , Hans-Juergen Scherle , Jens Kugler , Dirk Schaffer , Bernhard Gellrich
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
An optical element unit includes a first optical element module and a sealing arrangement. The first optical element module occupies a first module space and includes a first module component of a first component type and an associated second module component of a second component type. The first component type is optical elements and the second component type being different from the first component type. The sealing arrangement separates the first module space into a first space and a second space and substantially pre-vents, at least in a first direction, the intrusion of substances from one of the first space and the second space into the other one of the first space and the second space. The first module component at least partially contacts the first space and, at least in its area optically used, not contacting the second space. The second module component at least partially contacts the second space.
Public/Granted literature
- US20080225247A1 OPTICAL ELEMENT UNIT FOR EXPOSURE PROCESSES Public/Granted day:2008-09-18
Information query
IPC分类: