Invention Grant
US09046782B2 Resist composition for negative tone development and pattern forming method using the same 有权
用于负色调发展的抗蚀组合物和使用其的图案形成方法

  • Patent Title: Resist composition for negative tone development and pattern forming method using the same
  • Patent Title (中): 用于负色调发展的抗蚀组合物和使用其的图案形成方法
  • Application No.: US12664155
    Application Date: 2008-06-12
  • Publication No.: US09046782B2
    Publication Date: 2015-06-02
  • Inventor: Hideaki Tsubaki
  • Applicant: Hideaki Tsubaki
  • Applicant Address: JP Tokyo
  • Assignee: FUJIFILM Corporation
  • Current Assignee: FUJIFILM Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: Sughrue Mion, PLLC
  • Priority: JP2007-155082 20070612
  • International Application: PCT/JP2008/060800 WO 20080612
  • International Announcement: WO2008/153110 WO 20081218
  • Main IPC: G03F7/32
  • IPC: G03F7/32 G03F7/30 G03F7/20 G03F7/039 G03F7/004
Resist composition for negative tone development and pattern forming method using the same
Abstract:
For stably forming a high-precision fine pattern and thereby producing a highly integrated electronic device with high precision, a resist composition for negative tone development, which can reduce the line edge roughness and enhance the in-plane uniformity of the pattern dimension and furthermore, can ensure excellent bridge margin, and a pattern forming method using the same are provided.A resist composition for negative tone development, comprising (A) a resin capable of increasing the polarity by the action of an acid to increase the solubility in a positive tone developer and decrease the solubility in a negative tone developer, (B) a compound capable of generating an acid upon irradiation with an actinic ray or radiation, and (C) a solvent, wherein the log P value of the acid generated from the (B) compound capable of generating an acid upon irradiation with an actinic ray or radiation is from 1.5 to 12.0; and a pattern forming method using the same.
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