Invention Grant
- Patent Title: Mirror device
- Patent Title (中): 镜像设备
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Application No.: US13696528Application Date: 2011-12-29
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Publication No.: US09046651B2Publication Date: 2015-06-02
- Inventor: Hiroshi Someya , Yukio Watanabe , Katsuhiko Wakana , Osamu Wakabayashi
- Applicant: Hiroshi Someya , Yukio Watanabe , Katsuhiko Wakana , Osamu Wakabayashi
- Applicant Address: JP Tochigi
- Assignee: GIGAPHOTON INC.
- Current Assignee: GIGAPHOTON INC.
- Current Assignee Address: JP Tochigi
- Agency: McDermott Will & Emery LLP
- Priority: JP2011-032876 20110218; JP2011-060899 20110318
- International Application: PCT/IB2011/003183 WO 20111229
- International Announcement: WO2012/110847 WO 20120823
- Main IPC: G02B7/182
- IPC: G02B7/182 ; G02B7/18 ; G03F7/20

Abstract:
A mirror device may include: a mirror including a base plate, a reflective film on a first surface of the base plate, and a plurality of first protrusions on a second surface of the base plate; a plurality of support parts for respectively supporting the plurality of the first protrusions, each support part having a groove formed therein for guiding the first protrusion; and a plurality of clamps for respectively pressing the plurality of the first protrusions against the respective grooves in the plurality of the support parts.
Public/Granted literature
- US20130050862A1 MIRROR DEVICE Public/Granted day:2013-02-28
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