Invention Grant
US09046093B2 Fluid control device 有权
流体控制装置

Fluid control device
Abstract:
A fluid control device includes a vibrating plate including a first main surface and a second main surface, a driver that is provided on the first main surface of the vibrating plate and vibrates the vibrating plate, and a plate that is provided on the second main surface of the vibrating plate and has a hole provided thereon. At least one of either the vibrating plate or the plate is positioned between the hole and a region of the vibrating plate facing the hole, and includes a projection projecting in a direction intermediate between the hole and the region of the vibrating plate facing the hole.
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