A data processing device includes a memory, an arithmetic circuit that accesses the memory by outputting an access control signal CTRL that controls access to the memory, a first data storage unit that stores first data used when a self-diagnosis is performed, a read-modify-write circuit that generates second data by replacing a part of the first data stored in the first data storage unit with modify data outputted from the arithmetic circuit, and a determination unit that diagnoses a failure of the read-modify-write circuit by comparing the second data with an expected value.