Invention Grant
US09041905B2 Optical arrangement, in particular in a projection exposure apparatus for EUV lithography
有权
光学布置,特别是在用于EUV光刻的投影曝光装置中
- Patent Title: Optical arrangement, in particular in a projection exposure apparatus for EUV lithography
- Patent Title (中): 光学布置,特别是在用于EUV光刻的投影曝光装置中
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Application No.: US13414367Application Date: 2012-03-07
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Publication No.: US09041905B2Publication Date: 2015-05-26
- Inventor: Dirk Heinrich Ehm , Stefan-Wolfgang Schmidt , Guenther Dengel
- Applicant: Dirk Heinrich Ehm , Stefan-Wolfgang Schmidt , Guenther Dengel
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Edell, Shapiro & Finnan, LLC
- Priority: DE102009029282 20090908
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G03F7/20

Abstract:
An optical arrangement, in particular in a projection exposure apparatus for EUV lithography. In an aspect an optical arrangement has a housing (100, 200, 550, 780) in which at least one optical element is arranged, and at least one subhousing (140, 240, 560, 790, 811, 823, 824, 831, 841) which is arranged within the housing and which surrounds at least one beam incident on the optical element in operation of the optical system, wherein the internal space of the subhousing is in communication with the external space of the subhousing by way of at least one opening, wherein provided in the region of the opening is at least one flow guide portion which deflects a flushing gas flow passing through the opening from the internal space to the external space of the subhousing, at least once in its direction.
Public/Granted literature
- US20120224153A1 OPTICAL ARRANGEMENT, IN PARTICULAR IN A PROJECTION EXPOSURE APPARATUS FOR EUV LITHOGRAPHY Public/Granted day:2012-09-06
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