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US09036869B2 Multi-surface optical 3D microscope 有权
多面光学3D显微镜

Multi-surface optical 3D microscope
Abstract:
A method of detecting multi-surfaces of an object includes providing an imaging system capable of detecting surfaces of the object. After system parameters are set up, two-dimensional images of the object at multiple Z steps can be acquired. Each surface of the object can then be extracted using two steps. In a first step, the surface can be constructed based on a confidence threshold. In a second step, the surface can be enhanced using an interpolation filter.
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