Invention Grant
- Patent Title: Surface inspection apparatus and surface inspection method
- Patent Title (中): 表面检查装置和表面检查方法
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Application No.: US13526989Application Date: 2012-06-19
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Publication No.: US09036141B2Publication Date: 2015-05-19
- Inventor: Terumi Obuchi , Hiroshi Kikuchi , Yuji Inoue , Nobuhiro Obara , Kazuo Takahashi
- Applicant: Terumi Obuchi , Hiroshi Kikuchi , Yuji Inoue , Nobuhiro Obara , Kazuo Takahashi
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Brundidge & Stanger, P.C.
- Priority: JP2011-141952 20110627
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N21/88 ; G01N21/95

Abstract:
A surface inspection apparatus includes a blocking unit included in a subsequent processing unit that groups data items into having an arbitrary number of data items. The subsequent processing unit acquires a data item from each of the blocks. The blocking unit changes, in accordance with an instruction transmitted from a state monitoring unit, the number of data items to be blocked. A threshold processing unit acquires data items from the blocking unit that have values larger than a threshold, and transmits the data items to a memory. The state monitoring unit monitors an available capacity of the memory. When the state monitoring unit detects a reduction in the available capacity of the memory, it causes the blocking unit to increase the number of data items to be blocked into each of the blocks so that data does not overflow from the memory.
Public/Granted literature
- US20120327403A1 SURFACE INSPECTION APPARATUS AND SURFACE INSPECTION METHOD Public/Granted day:2012-12-27
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