Invention Grant
US09032832B2 XY all-directional precision alignment platform 有权
XY全向精密对准平台

XY all-directional precision alignment platform
Abstract:
An XY all-directional precision alignment platform is provided and includes an XY-axes moving platform including X-axis moving platform and Y-axis moving platform, the X-axis and Y-axis moving platforms being stacked together, and a θ-angle rotating platform, the θ-angle rotating platform stacked onto the carrier surface thereof; wherein the θ-angle rotating platform is driven to perform precise θ-angle rotation achieving 360° and is of a four-layered thickness only, achieving the goal of having a light and thin product.
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