Invention Grant
US09024388B2 Methods of forming gate structures for CMOS based integrated circuit products and the resulting devices
有权
为基于CMOS的集成电路产品形成栅极结构的方法和所得到的器件
- Patent Title: Methods of forming gate structures for CMOS based integrated circuit products and the resulting devices
- Patent Title (中): 为基于CMOS的集成电路产品形成栅极结构的方法和所得到的器件
-
Application No.: US13919676Application Date: 2013-06-17
-
Publication No.: US09024388B2Publication Date: 2015-05-05
- Inventor: Kisik Choi , Ruilong Xie
- Applicant: GlobalFoundries Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/43
- IPC: H01L29/43 ; H01L29/45 ; H01L29/772 ; H01L21/28 ; H01L21/8234 ; H01L27/092 ; H01L21/8238

Abstract:
One illustrative method disclosed herein includes forming replacement gate structures for an NMOS transistor and a PMOS transistor by forming gate insulation layers and a first metal layer for the devices from the same materials and selectively forming a metal-silicide material layer only on the first metal layer for the NMOS device but not on the PMOS device. One example of a novel integrated circuit product disclosed herein includes an NMOS device and a PMOS device wherein the gate insulation layers and the first metal layer of the gate structures of the devices are made of the same material, the gate structure of the NMOS device includes a metal silicide material positioned on the first metal layer of the NMOS device, and a second metal layer that is positioned on the metal silicide material for the NMOS device and on the first metal layer for the PMOS device.
Public/Granted literature
- US20140367790A1 METHODS OF FORMING GATE STRUCTURES FOR CMOS BASED INTEGRATED CIRCUIT PRODUCTS AND THE RESULTING DEVICES Public/Granted day:2014-12-18
Information query
IPC分类: