Invention Grant
- Patent Title: Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, and method for manufacturing piezoelectric element
- Patent Title (中): 液体喷射头,液体喷射装置,压电元件以及压电元件的制造方法
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Application No.: US14202886Application Date: 2014-03-10
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Publication No.: US09022533B2Publication Date: 2015-05-05
- Inventor: Shiro Yazaki , Takahiro Kamijo , Toshihiro Shimizu , Motoki Takabe
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Workman Nydegger
- Priority: JP2013-050103 20130313
- Main IPC: B41J2/045
- IPC: B41J2/045 ; H01L41/047 ; B41J2/055 ; B41J2/14 ; B41J2/16 ; H01L41/08 ; H01L41/09 ; H01L41/187 ; H01L41/318

Abstract:
A flow channel substrate includes pressure chambers, and the pressure chambers communicate with nozzle openings. Piezoelectric elements located on either side of the flow channel substrate include a first electrode, a piezoelectric layer, and a second electrode. The piezoelectric layer contains lead, titanium, and zirconium. The second electrode includes a first layer on the piezoelectric layer side and a second layer on the side of the first layer opposite the piezoelectric layer. The second electrode also includes projections. The projections are aggregates of the lead originating in the piezoelectric layer, and the projections stick out of the surface of the second electrode opposite the piezoelectric layer.
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