Invention Grant
- Patent Title: Detecting anomalous weak BEOL sites in a metallization system
- Patent Title (中): 检测金属化系统中异常弱的BEOL位点
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Application No.: US13560337Application Date: 2012-07-27
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Publication No.: US09021894B2Publication Date: 2015-05-05
- Inventor: Vivian W. Ryan , Holm Geisler , Dirk Breuer
- Applicant: Vivian W. Ryan , Holm Geisler , Dirk Breuer
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: G01L1/22
- IPC: G01L1/22 ; G01N3/00 ; H01L21/66 ; H01L23/00

Abstract:
Generally, the subject matter herein relates to detecting the presence of weak BEOL sites in a metallization system. One disclosed method includes performing a lateral force test on a pillar bump formed above a metallization system of a semiconductor chip, which includes contacting the pillar bump with a test probe while moving the test probe at a substantially constant speed that is less than approximately 1 μm/sec along a path that is oriented at a substantially non-zero angle relative to a plane of the metallization system. Furthermore, the test probe is moving substantially away from the metallization system so that a force imposed on the pillar bump by the test probe has an upward component that induces a tensile load on the metallization system. The disclosed method also includes determining a behavioral interaction between the pillar bump and the metallization system during the lateral force test.
Public/Granted literature
- US20140026676A1 DETECTING ANOMALOUS WEAK BEOL SITES IN A METALLIZATION SYSTEM Public/Granted day:2014-01-30
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