Invention Grant
- Patent Title: Systems and methods for measuring high-intensity light beams
- Patent Title (中): 用于测量高强度光束的系统和方法
-
Application No.: US13953423Application Date: 2013-07-29
-
Publication No.: US08988674B2Publication Date: 2015-03-24
- Inventor: Serguei Anikitchev , David Gaines
- Applicant: Ultratech, Inc.
- Applicant Address: US CA San Jose
- Assignee: Ultratech, Inc.
- Current Assignee: Ultratech, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Opticus IP Law PLLC
- Main IPC: G01J1/04
- IPC: G01J1/04

Abstract:
Systems and methods for measuring an intensity characteristic of a light beam are disclosed. The methods include directing the light beam into a prism assembly that includes a thin prism sandwiched by two transparent plates, and reflecting a portion of the light beam by total-internal-reflection surface to an integrating sphere while transmitting the remaining portion of the light beam through the two transparent plates to a beam dump. The method also includes detecting light captured by the integrating sphere and determining the intensity characteristic from the detected light.
Public/Granted literature
- US20150029497A1 SYSTEMS AND METHODS FOR MEASURING HIGH-INTENSITY LIGHT BEAMS Public/Granted day:2015-01-29
Information query