Invention Grant
US08971672B2 Integrated optical waveguide evanescent field sensor and longitudinal section of a substrate for use in such a sensor 有权
集成光波导衰减场传感器和用于这种传感器的基板的纵截面

Integrated optical waveguide evanescent field sensor and longitudinal section of a substrate for use in such a sensor
Abstract:
The invention relates to an integrated optical waveguide evanescent field sensor (1) for sensing of chemical and/or physical quantities, comprising a substrate (2) carrying a waveguide layer structure provided with—a waveguide core layer (10) sandwiched between two cladding layers (11, 12) formed by a lower (11) and a upper (12) cladding layer, of a lower refractive index than the waveguide core layer (10), —a sensing section (14A, 14B) comprising a sensing layer (13) included in the upper cladding layer (12), wherein a longitudinal section of said substrate including said waveguide layer structure and said sensing section (14A, 14B) is exchangeable as a separate element (20).
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