Invention Grant
US08971118B2 Methods of forming non-volatile memory devices including vertical NAND strings
有权
形成包括垂直NAND串的非易失性存储器件的方法
- Patent Title: Methods of forming non-volatile memory devices including vertical NAND strings
- Patent Title (中): 形成包括垂直NAND串的非易失性存储器件的方法
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Application No.: US14164712Application Date: 2014-01-27
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Publication No.: US08971118B2Publication Date: 2015-03-03
- Inventor: Beom-jun Jin , Byung-seo Kim , Sung-Dong Kim
- Applicant: Beom-jun Jin , Byung-seo Kim , Sung-Dong Kim
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec, P.A.
- Priority: KR10-2008-0054710 20080611
- Main IPC: G11C16/04
- IPC: G11C16/04 ; G11C16/06 ; H01L21/28 ; H01L27/115 ; H01L21/768

Abstract:
A NAND based non-volatile memory device can include a plurality of memory cells vertically arranged as a NAND string and a plurality of word line plates each electrically connected to a respective gate of the memory cells in the NAND string. A plurality of word line contacts can each be electrically connected to a respective word line plate, where the plurality of word line contacts are aligned to a bit line direction in the device.
Public/Granted literature
- US20140141610A1 NON-VOLATILE MEMORY DEVICES INCLUDING VERTICAL NAND STRINGS AND METHODS OF FORMING THE SAME Public/Granted day:2014-05-22
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