Invention Grant
US08970831B2 Optical constant measuring apparatus and method thereof 有权
光学常数测量装置及其方法

Optical constant measuring apparatus and method thereof
Abstract:
Disclosed is an optical constant measuring method which includes applying light to a sample including a target material; measuring a first optical signal from light reflected from the sample; grasping a structure of the sample based on the first optical signal; measuring a second optical signal from light penetrating the sample; grasping an overall optical property of the sample based on the second optical signal; and measuring an optical constant of the target material based on the measured structure and optical property of the sample.
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