Invention Grant
- Patent Title: Semiconductor light-receiving element
- Patent Title (中): 半导体光接收元件
-
Application No.: US13929412Application Date: 2013-06-27
-
Publication No.: US08970013B2Publication Date: 2015-03-03
- Inventor: Ryuji Yamabi , Yoshifumi Nishimoto
- Applicant: Sumitomo Electric Device Innovations, Inc.
- Applicant Address: JP Yokohama-shi
- Assignee: Sumitomo Electric Device Innovations, Inc.
- Current Assignee: Sumitomo Electric Device Innovations, Inc.
- Current Assignee Address: JP Yokohama-shi
- Agency: Venable LLP
- Agent Michael A. Sartori
- Priority: JP2012-147534 20120629
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/00 ; H01L31/02 ; H01L31/109 ; H01L31/0224

Abstract:
A semiconductor light-receiving element includes: a light-receiving portion that is provided on a semi-insulating substrate and has a mesa shape in which semiconductor layers are laminated; a lamination structure of insulating films that is provided on a part of a side face of the light-receiving portion and has a structure in which a first insulating film comprised of a silicon nitride film, a second insulating film comprised of a silicon oxynitride film and a third insulating film comprised of a silicon nitride film are laminated in contact with each other; and a resin film that is provided adjacent to the light-receiving portion, the resin film being sandwiched in or between any of the first insulating film, the second insulating film and the third insulating film.
Public/Granted literature
- US20140001592A1 SEMICONDUCTOR LIGHT-RECEIVING ELEMENT Public/Granted day:2014-01-02
Information query
IPC分类: