Invention Grant
- Patent Title: Modifying work function in PMOS devices by counter-doping
- Patent Title (中): 通过反掺杂改进PMOS器件的功能
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Application No.: US13750186Application Date: 2013-01-25
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Publication No.: US08969972B2Publication Date: 2015-03-03
- Inventor: Chun-Yi Lee , Harry-Hak-Lay Chuang , Ping-Wei Wang , Kong-Beng Thei
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L27/088 ; G11C11/412 ; H01L27/105 ; H01L27/11 ; H01L29/10 ; H01L29/66 ; H01L29/78 ; H01L27/092 ; H01L29/165

Abstract:
A semiconductor structure comprising an SRAM/inverter cell and a method for forming the same are provided, wherein the SRAM/inverter cell has an improved write margin. The SRAM/inverter cell includes a pull-up PMOS device comprising a gate dielectric over the semiconductor substrate, a gate electrode on the gate dielectric wherein the gate electrode comprises a p-type impurity and an n-type impurity, and a stressor formed in a source/drain region. The device drive current of the pull-up PMOS device is reduced due to the counter-doping of the gate electrode.
Public/Granted literature
- US20130193521A1 Modifying Work Function in PMOS Devices by Counter-Doping Public/Granted day:2013-08-01
Information query
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