Invention Grant
US08969912B2 Method and system for a GaN vertical JFET utilizing a regrown channel
有权
利用再生长通道的GaN垂直JFET的方法和系统
- Patent Title: Method and system for a GaN vertical JFET utilizing a regrown channel
- Patent Title (中): 利用再生长通道的GaN垂直JFET的方法和系统
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Application No.: US13198659Application Date: 2011-08-04
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Publication No.: US08969912B2Publication Date: 2015-03-03
- Inventor: Isik C. Kizilyalli , Hui Nie , Andrew P. Edwards , Linda Romano , David P. Bour , Richard J. Brown , Thomas R. Prunty
- Applicant: Isik C. Kizilyalli , Hui Nie , Andrew P. Edwards , Linda Romano , David P. Bour , Richard J. Brown , Thomas R. Prunty
- Applicant Address: US CA San Jose
- Assignee: Avogy, Inc.
- Current Assignee: Avogy, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01L29/74
- IPC: H01L29/74 ; H01L31/0328 ; H01L29/80 ; H01L29/76 ; H01L21/8238 ; H01L21/336 ; H01L29/66 ; H01L21/8252 ; H01L27/06 ; H01L29/808 ; H01L29/10 ; H01L29/20

Abstract:
A vertical III-nitride field effect transistor includes a drain comprising a first III-nitride material, a drain contact electrically coupled to the drain, and a drift region comprising a second III-nitride material coupled to the drain. The field effect transistor also includes a channel region comprising a third III-nitride material coupled to the drain and disposed adjacent to the drain along a vertical direction, a gate region at least partially surrounding the channel region, having a first surface coupled to the drift region and a second surface on a side of the gate region opposing the first surface, and a gate contact electrically coupled to the gate region. The field effect transistor further includes a source coupled to the channel region and a source contact electrically coupled to the source. The channel region is disposed between the drain and the source along the vertical direction such that current flow during operation of the vertical III-nitride field effect transistor is along the vertical direction, and the channel region extends along at least a portion of the second surface of the gate region.
Public/Granted literature
- US20130032812A1 METHOD AND SYSTEM FOR A GAN VERTICAL JFET UTILIZING A REGROWN CHANNEL Public/Granted day:2013-02-07
Information query
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