Invention Grant
- Patent Title: Laser processing method
- Patent Title (中): 激光加工方法
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Application No.: US10548522Application Date: 2003-09-11
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Publication No.: US08969752B2Publication Date: 2015-03-03
- Inventor: Kenshi Fukumitsu , Fumitsugu Fukuyo , Naoki Uchiyama
- Applicant: Kenshi Fukumitsu , Fumitsugu Fukuyo , Naoki Uchiyama
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: Hamamatsu Photonics K.K.
- Current Assignee: Hamamatsu Photonics K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Agency: Drinker Biddle & Reath LLP
- Priority: JPP2003-067276 20030312
- International Application: PCT/JP03/11626 WO 20030911
- International Announcement: WO2004/082006 WO 20040923
- Main IPC: B23K15/00
- IPC: B23K15/00 ; B23K26/00 ; B23K26/04 ; B23K26/14 ; B23K26/06 ; B23K26/02 ; B23K9/12 ; G01B15/00 ; H05B6/00 ; B23P19/00 ; C22F3/00 ; C23C8/00 ; B28D5/00 ; B28D1/22 ; B23K26/40

Abstract:
The present invention provides a laser processing method comprising the steps of attaching a protective tape 25 to a front face 3 of a wafer 1a, irradiating a substrate 15 with laser light L while employing a rear face of the wafer 1a as a laser light entrance surface and locating a light-converging point P within the substrate 15 so as to form a molten processed region 13 due to multiphoton absorption, causing the molten processed region 13 to form a cutting start region 8 inside by a predetermined distance from the laser light entrance surface along a line 5 along which the object is intended to be cut in the wafer 1a, attaching an expandable tape 23 to the rear face 21 of the wafer 1a, and expanding the expandable tape 23 so as to separate a plurality of chip parts 24 produced upon cutting the wafer 1a from the cutting start region 8 acting as a start point from each other.
Public/Granted literature
- US20070158314A1 Laser processing method Public/Granted day:2007-07-12
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