Invention Grant
US08967167B2 Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids
有权
阻挡结构和喷嘴装置，用于使用一种或多种处理流体处理微电子工件的工具
- Patent Title: Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids
- Patent Title (中): 阻挡结构和喷嘴装置，用于使用一种或多种处理流体处理微电子工件的工具
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Application No.: US13649755Application Date: 2012-10-11
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Publication No.: US08967167B2Publication Date: 2015-03-03
- Inventor: Jimmy D. Collins , David P. DeKraker , Tracy A. Gast , Alan D. Rose
- Applicant: FSI International, Inc.
- Applicant Address: US MN Chaska
- Assignee: Tel FSI, Inc.
- Current Assignee: Tel FSI, Inc.
- Current Assignee Address: US MN Chaska
- Agency: Kagan Binder, PLLC
- Main IPC: B08B3/00
- IPC: B08B3/00 ; H01L21/67
Abstract:
The present invention provides a tool for treating microelectronic workpieces with one or more treatment materials, including liquids, gases, fluidized solids, dispersions, combinations of these, and the like.
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