Invention Grant
- Patent Title: Optical system and method of use
- Patent Title (中): 光学系统及其使用方法
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Application No.: US13893322Application Date: 2013-05-13
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Publication No.: US08947633B2Publication Date: 2015-02-03
- Inventor: Olaf Conradi
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102007004723 20070122
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G03F7/20

Abstract:
A method for improving imaging properties of an optical system and an optical system of this type having improved imaging properties are described. The optical system can have a plurality of optical elements. In some embodiments, an optical element is positioned and/or deformed by mechanical force action and by thermal action. In certain embodiments, one optical element is positioned and/or deformed by mechanical force action and another optical element is deformed by thermal action.
Public/Granted literature
- US20130250261A1 OPTICAL SYSTEM AND METHOD OF USE Public/Granted day:2013-09-26
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